Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate
2006-05-30
2006-05-30
Le, Que T. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
C250S23700G
Reexamination Certificate
active
07053390
ABSTRACT:
In an exposure apparatus and method, an object is exposed through a projection optical system with an exposure beam irradiated on a mask. An illumination system illuminates a mark on the object and a detecting system detects the illuminated mark. Various illumination and exposure wavelengths are used. The mark is moved relative to illumination beams to enable determining positional information of the mark.
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Miles & Stockbridge P.C.
Nikon Corporation
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