Storage device slider with sacrificial lapping extension

Details Storage device slider with sacrificial lapping extension Storage device slider with sacrificial lapping extension

2006-02-14

2006-02-14

Wilson, Lee D. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S028000, C029S603100

Reexamination Certificate

active

06997784

ABSTRACT:
A process for fabricating sliders with one or more sacrificial structures (extensions) that facilitate lapping to create the air-bearing surface (ABS) is described. Prior to separating individual sliders from a wafer, a mask of material that is not removable by deep reactive ion etching (DRIE) is patterned on the surface of the sliders. The mask outlines a sacrificial extension around portions of the magnetic transducer elements that are nearest the predetermined plane which will become the ABS. The sacrificial extension makes the surface of the slider which will be lapped non-planar. The sacrificial extension extends below the predetermined ABS plane. When the sliders are individually separated by DRIE, the shape of the mask including the sacrificial extension is projected down into and along the slider body.

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IBM, “Method for Lapping Silicon Slider with Alumina Overcoat to Eliminate Silicon Dioxide Protrusion”, IBM Technical Disclosure Bulletin, vol. 40, pubno. 9, Sep. 1997, p. 93.

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