Movable apparatus, a measuring apparatus, a capacitive...

Details Movable apparatus, a measuring apparatus, a capacitive... Movable apparatus, a measuring apparatus, a capacitive...

2006-11-21

2006-11-21

Benson, Walter (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S662000

Reexamination Certificate

active

07138808

ABSTRACT:
The movable apparatus of a positioning device comprising a conductive stationary part and a conductive movable part, the stationary part has an electrode constituting a capacitor together with said movable part, and the electrode is covered by a guard electrode insulated from the stationary part, whereby a triaxial structure is formed around these electrodes.

REFERENCES:
patent: 3048775 (1962-08-01), Calvert
patent: 3626287 (1971-12-01), Di Niro
patent: 4918376 (1990-04-01), Poduje et al.
patent: 6828806 (2004-12-01), Hirota et al.
patent: 05-087845 (1993-06-01), None
patent: 09-318671 (1997-12-01), None
patent: WO 97/28418 (1997-08-01), None
Cascade Microtech, Inc., “The industry standard in on-wafer device characterization. Summit wafer probing systems,” 2004.

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