Gas-panel assembly

Details Gas-panel assembly Gas-panel assembly

2006-05-23

2006-05-23

Fox, John (Department: 3753)

Fluid handling

Systems

With flow control means for branched passages

Reexamination Certificate

active

07048008

ABSTRACT:
A fluid manifold and components for constructing the fluid manifold having a plurality of separate fluid-flow pathways. The manifold comprises a plurality of pipe modules which form said fluid-flow pathways and a plurality of block modules which can be joined together in various configurations with the pipe modules to form the fluid manifold. The pipe modules each include an elongate pipe section and two or more connectors, each having a proximal end section joined in fluid communication with the elongate pipe section and a distal end section terminating at a support structure. Each of the block modules provide (i) at least one groove formed in the block module, such that the confronting grooves in two block modules, when joined together, form an opening for receiving at least a part of the connector of the pipe module, thus to support the pipe module in the joined block modules, and, (ii) a structure for holding joined block sections in alignment with each other, wherein block sections can be removed and replaced without removal of adjacent block or pipe modules.

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Uchisawa, O. et al., “Compact Gas Control System”, 18thWorkshop on ULSI Ultra Clean Technology, Physics and Chemistry of Specialty Gases for Advanced Semiconductor Processings, pp. 15-24, 1992.

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