Resist resin

Details Resist resin Resist resin

2006-10-10

2006-10-10

Chu, John S. (Department: 1752)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

C430S270100, C430S905000, C430S910000, C526S281000

Reexamination Certificate

active

07119156

ABSTRACT:
According to the present invention, a resist resin having in its structure a specific bridged-bond-containing aliphatic ring, and a resist composition comprising the same are provided. By using this resist composition, a resist pattern excellent in both transparency against short-wavelength light and dry-etching resistance can be formed by alkali development with high resolution.

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J. H. Liu, et al., Makromol, Chem., Rapid Commun., vol. 3, No. 4, pp. 215-216, “Synthesis and Polymerization of a Chiral Methacrylate Derivative Containing an Oxobornyl Group”, Jan. 22, 1982.

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