Automated method of correcting aberrations in electron beam,...

Details Automated method of correcting aberrations in electron beam,... Automated method of correcting aberrations in electron beam,...

2006-06-13

2006-06-13

Lee, John R. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S310000, C250S311000, C250S3960ML, C250S492220, C250S492300

Reexamination Certificate

active

07060986

ABSTRACT:
There is disclosed a method and apparatus for automatically correcting aberrations in an electron beam by the use of a computer. An axis deviation-correcting means for correcting deviation of the axis of the beam, a focusing means for correcting defocus of the beam, a chromatic aberration-correcting means for correcting chromatic aberration in the beam, and an aperture aberration-correcting means for correcting aperture aberration in the beam are stored in the computer.

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