Thin film transistor array and repairing method thereof

Details Thin film transistor array and repairing method thereof Thin film transistor array and repairing method thereof

2006-06-06

2006-06-06

Cao, Phat X. (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Non-single crystal, or recrystallized, semiconductor...

Amorphous semiconductor material

C257S059000, C257S072000

Reexamination Certificate

active

07057207

ABSTRACT:
A repairing method of thin film transistor array is provided. The repairing method of thin film transistor array can remove a residue between pixel electrodes so as to prevent the residue from electrically connecting pixel electrodes adjacent to each other. The repairing method of thin film transistor array can also be provided to remove a portion of the pixel electrodes above a particle or a defect, which may cause leakage of a storage capacity. The parameters of repairing method of the thin film transistor array precisely controlled and the yield of the thin film transistor array can be effectively improved.

REFERENCES:
patent: 5298891 (1994-03-01), Plus et al.
patent: 6191832 (2001-02-01), Nakakura

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