Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate
2006-06-13
2006-06-13
Moore, Margaret G. (Department: 1712)
Stock material or miscellaneous articles
Composite
Of silicon containing
C427S377000, C427S387000
Reexamination Certificate
active
07060361
ABSTRACT:
A film is provided which can be applied to high-temperature processes and can fill microspaces between wirings without forming voids and prevent the occurrence of side etching, and also causes less degassing due to increase of an atmospheric temperature. A coating solution containing a reaction product which is obtained by hydrolyzing at least one first alkoxysilane compound selected from the group consisting of compounds represented by general formula (I) and compounds represented by general formula (II) in an organic solvent in the presence of an acid catalyst is applied on a target material to form a coating film, and then the coating film is baked in an atmosphere having an oxygen concentration of 1000 ppm or less to form a silica-based organic film. At least one second alkoxysilane compound selected from the group consisting of compounds represented by general formula (III) may be used in combination:in-line-formulae description="In-line Formulae" end="lead"?R12Si(OR2)2 (I)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?R3Si(OR4)3 (II)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?Si(OR5)4 (III)in-line-formulae description="In-line Formulae" end="tail"?wherein R1and R3each represents an alkyl group having 1 to 4 carbon atoms or a phenyl group, R2, R4, and R5each represents an alkyl group having 1 to 4 carbon atoms.
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Fujii Yasushi
Shibuya Tatsuhiko
Bedi, Esq. Ban
Dechert LLP
Moore Margaret G.
Tokyo Ohka Kogyo Co. Ltd.
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