Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

2006-10-17

2006-10-17

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S31300R

Reexamination Certificate

active

07122938

ABSTRACT:
There is disclosed a surface acoustic wave device having at least a diamond film, a piezoelectric-material film, and an electrode on a base material wherein all or some part of the diamond film consists of an electroconductive diamond in which a dopant is doped. Thereby, there can be provided a surface acoustic wave device wherein breakage of the substrate due to generation of static electricity can be prevented in a device manufacturing process so that the device manufacture yield can be increased, and electrification can be prevented at the time of real use so that high performance can be maintained for a long time, even if it is a surface acoustic wave device using diamond.

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Maeda et al., “Growth Behavior of Boron-Doped Diamond in Microwave Plasma-Assisted Chemical Vapor Deposition Using Trimethylboron as the Dopant Source” Diamond and Related Materials, vol. 7, No. 1, pp. 88-95, 1998.

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