Piezoelectric element, ink jet head, angular velocity...

Details Piezoelectric element, ink jet head, angular velocity... Piezoelectric element, ink jet head, angular velocity...

2006-08-01

2006-08-01

Pham, Hai (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S070000, C347S071000, C347S072000

Reexamination Certificate

active

07083270

ABSTRACT:
In a piezoelectric element20, a first electrode layer2made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal is formed on a silicon substrate1, and a piezoelectric layer3made of a rhombohedral or tetragonal perovskite oxide (e.g., PZT) is formed on the first electrode layer2so that the piezoelectric layer3is preferentially oriented along the (001) plane.

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R. Takayama et al.; “Preparation of epitaxial Pb(ZrxTi1-x)O3thin films and their crystallographic, pyroelectric, and ferroelectric properties”; Journal of Applied Physics; vol. 65, No. 4; Feb. 15, 1989; pp. 1666-1670.
P. Muralt et al.; “Texture control of Pb(Zr,Ti)TiO3thin films with TiO2Seeding”; Journal of Applied Physics; vol. 83, No. 7; Apr. 1, 1998; pp. 3835-3841.

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