Lithographic apparatus with autofocus system

Details Lithographic apparatus with autofocus system Lithographic apparatus with autofocus system

2006-11-14

2006-11-14

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S052000, C355S053000

Reexamination Certificate

active

07136149

ABSTRACT:
A lithographic apparatus having a projection system that includes a plurality of mirrors arranged to project the patterned radiation beam onto a target portion of the substrate. The lithographic apparatus further includes an autofocus system having a light source, a position sensitive detector, and a light directing arrangement for directing a first portion of light from the light source to the position sensitive detector. The light directing arrangement further directs a second portion of light from the light source into the projection system and, after the second portion of light has traveled through the projection system to the substrate and back through the projection system to the light directing arrangement, the second portion of light is directed onto the position sensitive detector.

REFERENCES:
patent: 5008705 (1991-04-01), Sindledecker
patent: 5489966 (1996-02-01), Kawashima et al.
patent: 5659384 (1997-08-01), Ina
patent: 6353470 (2002-03-01), Dinger

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