Micromachine vibration filter

Details Micromachine vibration filter Micromachine vibration filter

2006-02-07

2006-02-07

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S197000, C333S200000, C977S726000

Reexamination Certificate

active

06995633

ABSTRACT:
A compact high-performance mechanical vibration filter which deals with high frequency band signals. Microcolumn beams as minute mechanical vibrators are used to increase a mechanical resonance frequency. The plural microcolumn beams are arranged in an array and a common detection electrode surrounds each microcolumn beam with prescribed gaps between them, thereby preventing an output signal from becoming weak. When some of the mechanical vibrators are restrained from vibrating, it is possible to monitor and remove a noise component generated in the output signal by direct electromagnetic coupling of an input signal.

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patent: 62-95331 (1987-06-01), None
patent: WO 01/82479 (2001-11-01), None

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