Spectral image measurement apparatus and method using the same

Details Spectral image measurement apparatus and method using the same Spectral image measurement apparatus and method using the same

2006-10-24

2006-10-24

Evans, F. L. (Department: 2877)

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

C359S573000

Reexamination Certificate

active

07126686

ABSTRACT:
A spectral image measurement apparatus comprises: a spectral element array; a spectral element drive section for driving the elements; an inlet-side optical system for guiding a light to the element array; a detection-side optical system for forming an image with a diffracted light output from the element array; and an array sensor for detecting the diffracted light through the detection-side optical system. The element array includes: a substrate; and a plurality of micro-electrically-driven mechanical spectral elements arranged two-dimensionally on the substrate, wherein each of the elements comprises a diffraction grating having a diffraction surface, the diffraction grating being pivotably supported on the substrate; wherein each of the elements generates spectra from a light entering the diffraction surface by applying an electric field to the diffraction grating to tilt the diffraction grating; and wherein each of tilt angles of the diffraction gratings is capable of being set individually.

REFERENCES:
patent: 5905571 (1999-05-01), Butler et al.
patent: 6853449 (2005-02-01), Hocker
patent: 1-318929 (1989-12-01), None
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patent: 2001-97710 (2001-04-01), None

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