Method of improving the performance of microstructures

Details Method of improving the performance of microstructures Method of improving the performance of microstructures

2006-04-25

2006-04-25

Ben, Loha (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C359S298000, C356S218000, C438S052000, C216S002000

Reexamination Certificate

active

07034982

ABSTRACT:
A plastically deformable element of a microelectromechanical device is strained so as to improve the lifetime of the microelectromechanical device. The element of the device can be strained by deforming the element into a deformed state and holding the element at the deformed state for a particular time period so as to acquire an amount of plastic deformation. The operation states of the device are calibrated according to the states before straining and the acquired plastic deformation. After then, the device is operated in the calibrated states.

REFERENCES:
patent: 5411769 (1995-05-01), Hornbeck
patent: 5426070 (1995-06-01), Shaw et al.
patent: 5835256 (1998-11-01), Huibers
patent: 6046840 (2000-04-01), Huibers
patent: 6088474 (2000-07-01), Dudasko et al.
patent: 6204085 (2001-03-01), Strumpell et al.
patent: 6300294 (2001-10-01), Robbins et al.
patent: 6523961 (2003-02-01), Ilkov et al.
patent: 6529310 (2003-03-01), Huibers et al.
patent: 6867897 (2005-03-01), Patel et al.
patent: 2003/0214639 (2003-11-01), Patel
patent: 2003/0218753 (2003-11-01), Reuter
patent: 2003/0223084 (2003-12-01), Mehri et al.
patent: 2004/0008402 (2004-01-01), Patel et al.
patent: 2004/0042000 (2004-03-01), Mehri et al.
patent: 2004/0125346 (2004-07-01), Huibers
patent: 2004/0156090 (2004-08-01), Patel et al.
patent: 2005/0168795 (2005-08-01), Huibers
patent: 2005/0174626 (2005-08-01), Huibers
Craig R. Barrett, et al, “The Principles of Engineering Materials”, 1973 by Prentice-Hall, Inc., 6-5- pp. 215-217, 8-6-pp. 275-282.
K. Komvopoulos, “Surface Texturing and Chemical Treatment Methods for Reducing High Adhesion Forces at Micromachines Interfaces” SPIE vol. 3512, Sep. 1998.

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