Optically and electrically programmable silicided...

Details Optically and electrically programmable silicided... Optically and electrically programmable silicided...

2006-04-18

2006-04-18

Blum, David (Department: 2813)

Semiconductor device manufacturing: process

Making device array and selectively interconnecting

Using structure alterable to nonconductive state

Reexamination Certificate

active

07029955

ABSTRACT:
A silicided polysilicon based fuse device that is programmable by optical and electrical energy in the polysilicon layer without damage to nearby structures, comprising:a Si substrate;an insulating layer disposed on the substrate; anda fuse device section comprising poly-Si/a silicide/ and a barrier layer, the fuse device section forming an electrical discontinuity in the poly Si layer in response to an electrical pulse or an optical pulse applied to it.

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