Piezoelectric actuator, ink jet head, and discharge apparatus

Details Piezoelectric actuator, ink jet head, and discharge apparatus Piezoelectric actuator, ink jet head, and discharge apparatus

2006-04-25

2006-04-25

Kopec, Mark (Department: 1751)

Compositions

Piezoelectric

C310S311000, C310S363000, C310S358000, C347S072000, C257S295000, C428S615000, C428S632000

Reexamination Certificate

active

07033521

ABSTRACT:
A piezoelectric actuator includes: a buffer layer that is composed of an oxide or a nitride epitaxially formed on a Si substrate; a bottom electrode formed on the buffer layer, being composed of a transition metal oxide, and having a pseudo-cubic (100) or (111) orientation with a perovskite structure; a piezoelectric layer formed on the bottom electrode being composed of (Ba1−xMx)(Ti1−yZy)O3(where (M=Sr or Ca and 0≦x≦0.3) (Z=Zr or Hf and 0≦y≦0.2)) with a pseudo-cubic (001) or (111) orientation; and a top electrode that is formed on the piezoelectric layer. In this way, a piezoelectric actuator that uses barium titanate as the piezoelectric body and does not include Pb is provided.

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