Method of detecting over-actuation of MEM device

Details Method of detecting over-actuation of MEM device Method of detecting over-actuation of MEM device

2006-08-22

2006-08-22

Pham, Hai (Department: 2861)

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C347S070000

Reexamination Certificate

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07093920

ABSTRACT:
A method of detecting an over-actuation condition within a micro electro-mechanical device is provided. The device is of a type having a support structure and an actuating arm that is movable relative to the support structure as a result of thermal expansion of at least part of the actuating arm due to heat inducing current flow through that part. The method comprises passing a current pulse having a predetermined duration tpthrough the part of the actuating arm, detecting the rate of movement of the actuating arm to a predetermined position beyond an operating position of the actuating arm, and determining whether the detected rate is greater than a normal rate for desired actuation of the actuating arm so as to detect the over-actuation condition.

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