Piezoelectric element, liquid jetting head, and method for...

Details Piezoelectric element, liquid jetting head, and method for... Piezoelectric element, liquid jetting head, and method for...

2006-08-01

2006-08-01

Pham, Hai (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S070000, C347S071000

Reexamination Certificate

active

07083269

ABSTRACT:
The present invention provides a piezoelectric element having consistently high piezoelectric characteristics, and a liquid jetting head in which this element is used. A bottom electrode42(which contains Ir), a Ti layer of no less than 4 nm and no more than 6 nm, a piezoelectric thin film43, and a top electrode44are sequentially layered on a ZrO2film32. The piezoelectric thin film43has the degree of orientation in the 100 plane, as measured by the X-ray diffraction wide angle technique, is 70% or greater, the degree of orientation in the 110 plane is 10% or less, and the degree of orientation in the 111 plane constitutes the remaining balance. Such piezoelectric thin film43can be obtained stably with good reproducibility by keeping the humidity of the environment for forming the piezoelectric thin film at 30% Rh or less.

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Copy of European Search Report for European Application No. 03002067.7, mailed Oct. 20, 2005, European Patent Office, Munich, Germany.

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