Method of manufacturing a longitudinal microsolenoid

Details Method of manufacturing a longitudinal microsolenoid Method of manufacturing a longitudinal microsolenoid

2006-09-19

2006-09-19

Kim, Paul D. (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S602100, C029S846000, C029S847000, C216S002000, C216S039000, C216S049000, C216S058000, C216S067000, C427S096400, C427S097100, C427S116000, C427S123000, C427S124000, C428S003000, C428S042100, C428S057000, C428S098000, C430S313000, C430S316000, C430S317000

Reexamination Certificate

active

07107668

ABSTRACT:
A photosensitive material is coated on an insulating material (13) stacked on a substrate (1) (FIG.16A), and exposed and developed using a mask having a light-shielding film capable of controlling a light transmittance from 100% to 0% annularly and continuously to form a spiral photosensitive material (FIG.16B). After conducting treatment at a high temperature, the insulating material under the photosensitive material is spirally formed by etching (FIG.16C). A metal (12) is stacked on the substrate (FIG.16D), and a photosensitive material is coated (FIG.16E). The photosensitive material is exposed and developed using a mask having an annular light-shielding film with a light transmittance of 0% to leave the photosensitive material covering only the metal on the base of the spiral structure (FIG.16F). After treatment at a high temperature is conducted and the metal exposed is etched (FIG.16G), the photosensitive material is removed (FIG.16H).

REFERENCES:
patent: 3290758 (1966-12-01), Moyer
patent: 5514832 (1996-05-01), Dusablon et al.
patent: 6303971 (2001-10-01), Rhee
patent: 52046787 (1977-04-01), None
patent: 60173737 (1985-09-01), None
patent: 1028813 (1983-07-01), None
“Helical microstructures grown by laser assisted chemical vapor deposition”; Boman, M.; Westberg, H.; Johansson, S.; Schweitz, J.-A.; 1992, MEMS '92, Proceedings; Feb. 4-7, 1992; pp. 162-167.

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