Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2006-10-31
2006-10-31
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S593000, C029S610100, C029S612000, C029S830000, C029S846000, C029S847000, C156S089180, C174S255000, C174S256000, C219S121680, C219S121690, C427S097200, C427S097500
Reexamination Certificate
active
07127812
ABSTRACT:
A board20is provided with a Cu film30as a conformal mask, in which are formed a register mark30band an opening3athrough which a via hole is formed. A camera senses this register mark30bso that the position of the board30is determined. A laser beam is directed to the approximate position of the opening30a, so that the opening26athrough which the via hole is drilled is formed. The accuracy of the position of the opening of the via hole depends on the accuracy of the position of the opening30ain the Cu film30as the conformal mask. Therefore, the via hole can be formed at an adequate position despite the low accuracy of the position for laser irradiation.
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Asai Motoo
Hiramatsu Yasuji
Hirose Naohiro
Kariya Takashi
IBIDEN Co., Ltd.
Phan Tim
Tugbang A. Dexter
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