Method for producing ceramic diaphragm structure

Details Method for producing ceramic diaphragm structure Method for producing ceramic diaphragm structure

1999-04-06

2000-04-04

Mayes, Curtis

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156 8912, 310324, B32B 3126

Patent

active

060456426

ABSTRACT:
A method for producing a ceramic diaphragm structure includes preparing a ceramic green substrate having at least one window and a plurality of layers, and a thin ceramic green sheet. The ceramic green sheet is superposed on the ceramic green substrate to cover the window and thereby provide a unitary laminate. The laminate is then fired so that the ceramic green sheet provides a diaphragm portion which protrudes in a direction away from the window. The average sintering temperature difference or the average shrinkage-rate difference, of the layers of the ceramic green substrate, is larger than zero.

REFERENCES:
patent: 5545461 (1996-08-01), Takeuchi et al.
patent: 5600197 (1997-02-01), Takeuchi et al.
patent: 5634999 (1997-06-01), Takeuchi et al.
patent: 5681410 (1997-10-01), Takeuchi et al.
patent: 5733670 (1998-03-01), Takeuchi et al.
patent: 5798168 (1998-08-01), Takeuchi et al.

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