Variable capacitance membrane actuator for wide band tuning...

Electricity: electrical systems and devices – Electrostatic capacitors – Variable

Reexamination Certificate

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C361S272000, C361S278000, C361S279000, C361S282000, C361S283100, C361S292000

Reexamination Certificate

active

07085121

ABSTRACT:
A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible membrane, and bias circuitry located above the membrane. Variation of the capacitance of the electronic circuit is obtained by pulling the membrane upwards by means of the bias circuitry. The disclosed device provides a sizeable capacitance variation and high Q factor, resulting in overall low filter insertion loss. A nearly constant group delay over a wide operating bandwidth is also obtained.

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