Method of controlling photoemission from porous silicon using io

Fishing – trapping – and vermin destroying

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437 71, 437127, H01L 3300, H01L 21465

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active

054200490

ABSTRACT:
This invention describes a method of controlling light emission from porous silicon and porous silicon devices using ion implantation. The emitted light intensity can be either selectively increased or decreased by suitable processing of the silicon prior to the fabrication of the porous layer. Amorphizing the silicon prior to the fabrication of the porous layer quenches the light emission. Ion implantation with doses below the amorphization level enhances the intensity of the emitted light of the subsequently fabricated porous layer.

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