Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2006-08-08
2006-08-08
Cherry, Euncha P. (Department: 2872)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
C359S291000
Reexamination Certificate
active
07088486
ABSTRACT:
A micromirror array110fabricated on a semiconductor substrate11. The array110is comprised of four operating layers12, 13, 14, 15. An addressing layer12is fabricated on the substrate. A raised electrode layer13is spaced above the addressing layer by an air gap. A hinge layer14is spaced above the raised electrode layer13by another air gap. A mirror layer15is spaced over the hinge layer14by a third air gap.
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patent: 5583688 (1996-12-01), Hornbeck
patent: 5867202 (1999-02-01), Knipe et al.
patent: 6028690 (2000-02-01), Carter et al.
patent: 6781731 (2004-08-01), Choi
patent: 2003/0095318 (2003-05-01), DiCarlo et al.
Brady III Wade James
Brill Charles A.
Cherry Euncha P.
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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