Exposure apparatus and device fabrication method

Details Exposure apparatus and device fabrication method Exposure apparatus and device fabrication method

2006-05-16

2006-05-16

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S052000, C359S822000, C359S846000

Reexamination Certificate

active

07046335

ABSTRACT:
An exposure apparatus illuminates a pattern on an original form, introduces light from the pattern to a plate, and exposes the plate. The exposure apparatus includes at least one optical element, and forcing member that applies a force to the at least one optical element in a non-contact manner.

REFERENCES:
patent: 5212582 (1993-05-01), Nelson
patent: 6295118 (2001-09-01), Takeuchi
patent: 6526118 (2003-02-01), Komatsuda et al.
patent: 6549271 (2003-04-01), Yasuda et al.
patent: 6747783 (2004-06-01), Sandstrom
patent: 6781671 (2004-08-01), Komatsuda
patent: 6909493 (2005-06-01), Sudoh
patent: 2004/0257683 (2004-12-01), Petasch et al.

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