Substrate-embedded capacitor, production method thereof, and...

Details Substrate-embedded capacitor, production method thereof, and... Substrate-embedded capacitor, production method thereof, and...

2006-07-18

2006-07-18

Smith, Zandra V. (Department: 2822)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

C438S387000, C438S459000, C361S301400

Reexamination Certificate

active

07078311

ABSTRACT:
There is provided a capacitor embedded in a substrate having a small thickness and requiring only a small space for short connection lines. The substrate-embedded capacitor comprises a substrate having an opening, a first conductive layer on the substrate, a dielectric layer on the first conductive layer, a second conductive layer on the dielectric layer, and an insulating layer formed on the second conductive layer and having an opening. In the substrate-embedded capacitor, the first conductive layer and the second conductive layer are exposed through the openings in the substrate and the insulating layer, respectively.

REFERENCES:
patent: 5343176 (1994-08-01), Hasler
patent: 5796648 (1998-08-01), Kawakubo et al.
patent: 6384422 (2002-05-01), Shimoji
patent: 6388207 (2002-05-01), Figueroa et al.
patent: 6664580 (2003-12-01), Jao
patent: 6750114 (2004-06-01), Adler et al.
patent: 6887716 (2005-05-01), Fox et al.

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