Temperature adjustment apparatus, exposure apparatus having...

Details Temperature adjustment apparatus, exposure apparatus having... Temperature adjustment apparatus, exposure apparatus having...

2006-01-31

2006-01-31

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C359S820000, C062S003700, C165S289000

Reexamination Certificate

active

06992306

ABSTRACT:
A temperature adjustment apparatus for adjusting the temperature of an optical member includes a first radiation mechanism, with a first radiation member, that transfers the radiation heat between a predetermined area of the optical member and for adjusting the temperature of the optical member by the first radiation member; and a shielding member for reducing radiation heat transferred to an area other than the determined area among the radiation heat from the first radiation member.

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