Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2006-09-12
2006-09-12
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
07106412
ABSTRACT:
A lithographic projection apparatus includes a radiation system constructed and arranged to supply a projection beam of radiation, a support structure constructed and arranged to support a patterning structure, the patterning structure constructed and arranged to pattern the projection beam according to a desired pattern, a substrate support constructed and arranged to support a substrate, and a projection system constructed and arranged to project the patterned beam onto a target portion of the substrate. The apparatus further includes a gas flushing system comprising radial gas flow outlets, said gas flushing system being constructed and arranged to generate a radial gas flow through said radial gas flow outlets in an intermediate space defined between said gas flushing system and said substrate, wherein the radial gas flow has a radial velocity directed outwards in said space with a magnitude larger than zero at every location in said space.
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De Bokx Pieter Klaas
Hultermans Ronald Johannes
Jonkers Adrianus Cornelius Antonius
Van Empel Tjarko Adriaan Rudolf
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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