Manufacturing method of an electron emitting apparatus

Details Manufacturing method of an electron emitting apparatus Manufacturing method of an electron emitting apparatus

2006-01-31

2006-01-31

Nguyen, Tuan H. (Department: 2813)

Semiconductor device manufacturing: process

Electron emitter manufacture

C445S024000

Reexamination Certificate

active

06991949

ABSTRACT:
A cold cathode field emission device comprising a cathode electrode11formed on a supporting member10, a gate electrode13which is formed above the cathode electrode11and has an opening portion14, and an electron emitting portion15formed on a surface of a portion of the cathode electrode11which portion is positioned in a bottom portion of the opening portion14, said electron emitting portion15comprising a carbon-group-material layer23, and said carbon-group-material layer23being a layer formed from a hydrocarbon gas and a fluorine-containing hydrocarbon gas.

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