Drive mechanism, exposure device, optical equipment, and...

Details Drive mechanism, exposure device, optical equipment, and... Drive mechanism, exposure device, optical equipment, and...

2006-09-19

2006-09-19

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C074S470000, C074S517000, C310S328000, C359S819000, C385S016000

Reexamination Certificate

active

07110089

ABSTRACT:
The present invention provides a drive mechanism having a high rigidity and capable of performing fine adjustment in 6-axis directions of an optical element such as a mirror or a lens, or a support member for supporting the optical element, in optical equipment such as an exposure device. The drive mechanism has such a feature that three monolithic planar 3-joint or 4-joint link mechanisms are each arranged between a movable portion and a stationary portion through the intermediation of a bearing having at least one degree of freedom of rotation.

REFERENCES:
patent: 5095764 (1992-03-01), Saner
patent: 5986827 (1999-11-01), Hale
patent: 2000-357651 (2000-12-01), None
patent: 2002 131605 (2002-05-01), None

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