Electronic instrument having mirror device

Details Electronic instrument having mirror device Electronic instrument having mirror device

2006-03-21

2006-03-21

Shafer, Ricky D. (Department: 2872)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C359S224200, C359S872000

Reexamination Certificate

active

07016100

ABSTRACT:
To provide a mirror device, an optical switch, an electronic instrument, and a mirror device driving method in which a large driving displacement can be produced for a mirror with a smaller driving force, a silicon substrate includes: at least one first mirror-side operating region integrally formed with the mirror and provided at a different position from the mirror; and at least one second mirror-side operating region provided at an end portion of the mirror, and a glass substrate includes: an opposite-side operating section, a coulomb force acting between the first mirror-side operating region and the opposite-side operating section; and another opposite-side operating section, the coulomb force acting between the second mirror-side operating region and the other opposite-side operating section. The glass substrate is formed so that a gap between the first mirror-side operating region and the opposite-side operating section is narrower than a gap between the second mirror-side operating region and the opposite-side operating section.

REFERENCES:
patent: 5331454 (1994-07-01), Hornbeck
patent: 5554851 (1996-09-01), Hirai et al.
patent: 5959760 (1999-09-01), Yamada et al.
patent: 5999303 (1999-12-01), Drake
patent: 5999306 (1999-12-01), Atobe et al.
patent: 6438282 (2002-08-01), Takeda et al.
patent: 6603591 (2003-08-01), Mori
patent: 6614581 (2003-09-01), Anderson
patent: 6747786 (2004-06-01), Murakami et al.
patent: 6914712 (2005-07-01), Kurosawa
patent: 2005/0185310 (2005-08-01), Kurosawa
patent: 09-159937 (1997-06-01), None
patent: 2001-311900 (2001-11-01), None
Yasuda et al., “CMOS Drivable Electrostatic Microactuator with Large Deflection”,Proceedings of MEMS 97,Jan. 26, 1997, pp. 90-95.

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