Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-07-04
2006-07-04
Toatley, Gregory (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S498000
Reexamination Certificate
active
07072048
ABSTRACT:
A measuring system for an apparatus having a bed, a first stage movable in a first direction relative to the bed, and a second stage movable in a second direction at right angles to the first direction, relative to the first stage. A first interferometer measures displacement in the first direction between a first reference reflector and a first target reflector fixed to the first stage. A second interferometer (a) measures displacement in the second direction between a second reference reflector and a second target reflector fixed to the second stage, (b) includes an intermediate reflector fixed to the first stage, (c) produces a beam that extends in the first direction from a position fixed to the bed to the intermediate reflector and in the second direction from the intermediate reflector to the second target reflector and (d) can therefore have a head that is mounted on the bed.
REFERENCES:
patent: 5757160 (1998-05-01), Kreuzer
patent: 5801832 (1998-09-01), Van Den Brink
patent: 5828456 (1998-10-01), Aoki et al.
patent: 6678056 (2004-01-01), Downs
Detschel Marissa J
Interferomet Limited
Stewart John V.
Toatley Gregory
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