Scanning probe

Details Scanning probe Scanning probe

2006-07-18

2006-07-18

Guadalupe-McCall, Yaritza (Department: 2859)

Geometrical instruments

Gauge

Having a movable contact probe

C033S558000, C033S561000

Reexamination Certificate

active

07076883

ABSTRACT:
A scanning probe (1, 10) according to the present invention includes a measurement stylus (stylus) (6) movably supported via elastic members (5D,5E,5F) on a probe body (4), fine feeders (3, 7) for moving the probe body (4) and the measurement stylus (6) against a workpiece within a fine range, a contacting force detector (5G) for detecting a contacting force between the measurement stylus (6) and a surface of the workpiece, and a contacting force adjuster (8) for adjusting the contacting force by removing the inertial force acting to the measurement stylus (6) because of acceleration from the contacting force. Because of this feature, a measuring force can be adjusted by providing feedback controls to the fine feeders (3, 7), so that the tracking capability is ensured to provide a high response rate and high precision in measurement. Further by eliminating influence of the inertial force of the measurement stylus (6), a measurement error is corrected to obtain a correct measuring force, and high precision measurement can be executed.

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patent: 6708420 (2004-03-01), Flanagan
patent: 8-43066 (1996-02-01), None

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