Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate
2006-01-31
2006-01-31
Kwok, Helen (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
C073S504040, C073S504120
Reexamination Certificate
active
06990864
ABSTRACT:
A semiconductor dynamic quantity sensor includes a semiconductor substrate that includes a movable electrode, a pair of first fixed electrodes, and a pair of second fixed electrodes. The first and second pairs of first detection capacitances and the first and second pairs of second detection capacitances are formed by the electrodes. The dynamic quantity related to the force applied to the sensor is measured on the basis of the sum of the differential output between the first pair of the first detection capacitances, the differential output between the second pair of the first detection capacitances, the differential output between the first pair of the second detection capacitances, and the differential output between the second pair of the second detection capacitances, when the movable electrode moves along the first direction or the second direction under the force. The sum includes a relatively small amount of noises.
REFERENCES:
patent: 5734105 (1998-03-01), Mizukoshi
patent: 5812427 (1998-09-01), Nonoyama et al.
patent: 5880369 (1999-03-01), Samuels et al.
patent: 5894091 (1999-04-01), Kubota
patent: 5969225 (1999-10-01), Kobayashi
patent: 6450031 (2002-09-01), Sakai et al.
patent: 6467349 (2002-10-01), Andersson et al.
patent: 6502462 (2003-01-01), Sakai
patent: 6591678 (2003-07-01), Sakai
patent: 6672161 (2004-01-01), Sakai et al.
patent: 0 547 742 (1993-06-01), None
patent: A-H09-113534 (1997-05-01), None
patent: 11-201850 (1999-07-01), None
patent: 2001-004658 (2001-01-01), None
patent: 2002-71708 (2002-03-01), None
Chinese Office Action dated Aug. 12, 2005 with its English translation.
Denso Corporation
Kwok Helen
Posz Law Group , PLC
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