Semiconductor manufacturing line availability evaluating...

Details Semiconductor manufacturing line availability evaluating... Semiconductor manufacturing line availability evaluating...

Filed on

2006-01-03

Date issued

2006-01-03

Examiner

Bahta, Kidest (Department: 2125)

Patent Class

Data processing: generic control systems or specific application

SubClass

Specific application, apparatus or process

SubSubClass

Product assembly or manufacturing

Other Related Categories

C700S097000, C438S775000

Type

Reexamination Certificate

Status

active

Patent number

06983191

Description

ABSTRACT:
An availability evaluation system of a semiconductor manufacturing line, comprising a unit configured to calculate an incidence probability Xi (i=1 to k) in combination by applying a tool operation probability and a tool stoppage probability to all combinations “k” in which at least a line fabrication availability is not zero, of the combinations of operation and stoppage of tools, and by obtaining a product of the probabilities of all the tools, and a unit configured to, when a product between the incidence probability Xi of a combination and a fabrication availability Yi of the combination is defined as a probability converted fabrication availability with respect to each of the combinations, calculate an availability value of Q=Σ(i=1 to k)X1×Y1/F obtained by dividing a sum of probability converted fabrication availabilities of the combinations by a fabrication availability F at a 100% availability.

REFERENCES:
patent: 6671570 (2003-12-01), Schulze
patent: 6801819 (2004-10-01), Barto et al.
patent: 2004/0243266 (2004-12-01), Mata et al.
Y. Mikata et al.; “Improvement of Mini Fab Uptime by the Multi-Task and Multi-Functional Tools”; ISSM 2003 Conference Proceedings, Int'l. Symposium on Semiconductor Manufacturing, pp. 73-76, (2003).

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