Multi-oxidizer slurry for chemical mechanical polishing

Details Multi-oxidizer slurry for chemical mechanical polishing Multi-oxidizer slurry for chemical mechanical polishing

1997-02-18

2000-03-07

Dang, Thi

Compositions

Etching or brightening compositions

252 794, C09K 1300, C09K 1306

Patent

active

060335963

ABSTRACT:
A chemical mechanical polishing slurry comprising a first oxidizer of urea hydrogen peroxide, a second oxidizer, an organic acid, and an abrasive, and a method for using the chemical mechanical polishing slurry to remove titanium, titanium nitride, and an aluminum alloy containing layer from a substrate.

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