Liner with improved electromigration redundancy for...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum

Reexamination Certificate

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C257S750000, C257S751000

Reexamination Certificate

active

06992390

ABSTRACT:
An interconnection structure for semiconductor integrated circuits is disclosed. The interconnection structure comprises a redundant layer, and at least one adhesion/diffusion barrier layer. The redundant layer comprises a metal or metal alloy selected from Ta, Mo, W, Be, Cr, Co, Ir, Ni, Nb, Os, Pd, Pt, Rb, Rh, Ru, and Th.

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Edelstein, et al., “Full Copper Wiring in a Sub-0.25mm CMOS ULSI Technology”,Tech. Dig. IEEE IEDM(International Electron Devices Meeting), 376, (1997).
Edelstein, et al., “A High Performance Liner for Copper Damascene Interconnects”,Digesto of Technical Pater, IEEE IITC(International Interconnect Technology Conference), pp. 9-11 (2001).
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Li, et al., “Line Depletion Electromigration Characteristics of Cu Interconnects”, IRPS 2003 (International Reliability Physics Symposium 2003).

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