Polishing method, polishing device, glass substrate for...

Details Polishing method, polishing device, glass substrate for... Polishing method, polishing device, glass substrate for...

2006-07-04

2006-07-04

Nguyen, George (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S044000, C451S104000, C451S113000

Reexamination Certificate

active

07070481

ABSTRACT:
There are disclosed a polishing method and a polishing device in which cleaning of a glass substrate surface can be achieved to a high level. A glass substrate (MD substrate1) in the shape of a circular disc having a circular hole in a center portion is polished with an abrasive liquid50containing free abrasive grains being supplied, and an inner peripheral end surface of the glass substrate is polished using the abrasive liquid containing the free abrasive grains by rotating a rotary brush4or a polishing pad in contact with the inner peripheral end surface.

REFERENCES:
patent: 5486134 (1996-01-01), Jones et al.
patent: 5861066 (1999-01-01), Moinpour et al.
patent: 6036785 (2000-03-01), Ferrell
patent: 6055694 (2000-05-01), Steere
patent: 6059903 (2000-05-01), Roloff et al.
patent: 6280294 (2001-08-01), Miyamoto
patent: 6641465 (2003-11-01), Miyamoto

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