Laser apparatus and method for controlling the same

Details Laser apparatus and method for controlling the same Laser apparatus and method for controlling the same

2006-04-04

2006-04-04

Harvey, Min Sun (Department: 2828)

Coherent light generators

Particular beam control device

C372S030000

Reexamination Certificate

active

07023885

ABSTRACT:
A laser apparatus includes a laser element that emits the laser beam. A detector detects the laser beam emitted from the laser element. A controller controls the laser element such that the laser beam is oscillated subject to multiple conditions, such as the emission frequency and the energy of the laser beam, when the laser element is in a ready state, based on the detection results. In the ready state, the laser beam is not emitted from the apparatus onto a subject. Closely monitoring the oscillated beam in the ready state allows the precise beam desired to be emitted in an operational mode. The apparatus is useful for fabricating semiconductor devices.

REFERENCES:
patent: 5010230 (1991-04-01), Uemura
patent: 5097291 (1992-03-01), Suzuki
patent: 5191374 (1993-03-01), Hazama et al.
patent: 5383217 (1995-01-01), Uemura
patent: 5473412 (1995-12-01), Ozawa
patent: 5627627 (1997-05-01), Suzuki
patent: 5728495 (1998-03-01), Ozawa
patent: 5914773 (1999-06-01), Kurosawa et al.
patent: 6621846 (2003-09-01), Sandstrom et al.

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