Method for the manufacture of an electrodisplacive actuator arra

Details Method for the manufacture of an electrodisplacive actuator arra Method for the manufacture of an electrodisplacive actuator arra

1994-07-20

1998-04-07

Hughes, S. Thomas

Metal working

Piezoelectric device making

359224, 359291, 359850, G02B 2600, H01L 4122

Patent

active

057350264

ABSTRACT:
The inventive method for the manufacturing an array of M.times.N electrodisplacive actuated mirrors comprises a step of: preparing a ceramic wafer, made of an electrodisplacive material, having a top and bottom surface; forming an array of M.times.N first electrodes and an array of M+1 second electrodes on the bottom and top surface of ceramic wafer, respectively; mounting the ceramic wafer on top of an active matrix; covering each of the M +1 second electrodes with an insulating layer; forming a set of M trenches; placing an array of M.times.N hinges on the top surface of the ceramic wafer; and forming a mirror on the top surface of each of the M.times.N hinges to thereby form an array of M.times.N electrodisplacive actuated mirrors.

REFERENCES:
patent: 5159225 (1992-10-01), Um
patent: 5469302 (1995-11-01), Lim
patent: 5506720 (1996-04-01), Yoon
patent: 5543959 (1996-08-01), Jeon
patent: 5550680 (1996-08-01), Yoon
patent: 5552923 (1996-09-01), Min

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