Processes for preparing high purity polycyclic fluoroalkanes

Details Processes for preparing high purity polycyclic fluoroalkanes Processes for preparing high purity polycyclic fluoroalkanes

2006-07-18

2006-07-18

Richter, Johann (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Halogen containing

Reexamination Certificate

active

07078575

ABSTRACT:
Processes for preparing high purity polycyclic fluoroalkanes are provided. The polycyclic fluoroalkanes are useful as solvents, cleaning agents, heat transfer fluids, refrigerants, lubricants, and, in a preferred embodiment, by virtue of high refractive index and high transparency to UV wavelengths, optical applications in the vacuum ultraviolet (VUV).

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M. Switkes et. al., Resolution Enhancement of 157 nm Lithography by Liquid Immersion, Proc. SPIE, 2002, pp. 459-465, vol. 4691.

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