Stage driving apparatus and probe method

Details Stage driving apparatus and probe method Stage driving apparatus and probe method

Filed on

2006-09-12

Date issued

2006-09-12

Examiner

Nguyen, Kiet T. (Department: 2881)

Patent Class

Electricity: measuring and testing

SubClass

Fault detecting in electric circuits and of electric components

SubSubClass

Of individual circuit component or element

Other Related Categories

C324S765010, C324S1540PB

Type

Reexamination Certificate

Status

active

Patent number

07106082

Description

ABSTRACT:
A stage driving apparatus for a stage of this invention includes a horizontal driving mechanism which moves in a horizontal direction a stage to place a wafer thereon, and an elevating mechanism which moves the stage in a vertical direction. The elevating mechanism has a first elevating mechanism which supports the horizontal driving mechanism and vertically moves the horizontal driving mechanism, and a second elevating mechanism which supports the stage on the horizontal driving mechanism and vertically moves the stage over a short distance with a piezoelectric element.

REFERENCES:
patent: 5642056 (1997-06-01), Nakajima et al.
patent: 6501289 (2002-12-01), Takekoshi
patent: 2001/0054892 (2001-12-01), Takekoshi
patent: 2004/0227536 (2004-11-01), Sugiyama et al.
patent: 7-321165 (1995-12-01), None
patent: 9-330960 (1997-12-01), None
patent: 11-251379 (1999-09-01), None

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