Wafer identification mark

Details Wafer identification mark Wafer identification mark

2006-03-07

2006-03-07

Frech, Karl D. (Department: 2876)

Registers

Records

Particular code pattern

C257S797000, C483S015000, C483S064000

Reexamination Certificate

active

07007855

ABSTRACT:
A semiconductor wafer including a plurality of pits in the semiconductor wafer. The pits are arranged in an information-providing pattern and are readable after completion of processing on the wafer.

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