Method for forming a ruthenium metal layer

Details Method for forming a ruthenium metal layer Method for forming a ruthenium metal layer

2006-03-28

2006-03-28

Chen, Bret (Department: 1762)

Coating processes

Coating by vapor, gas, or smoke

Metal coating

C427S255310, C427S376200

Reexamination Certificate

active

07018675

ABSTRACT:
A method for forming a ruthenium metal layer comprises combining a ruthenium precursor with a measured amount of oxygen to form a ruthenium oxide layer. The ruthenium oxide is annealed in the presence of a hydrogen-rich gas to react the oxygen in the ruthenium oxide with hydrogen, which results in a ruthenium metal layer. By varying the oxygen flow rate during the formation of ruthenium oxide, a ruthenium metal layer having various degrees of smooth and rough textures can be formed.

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