Position detection apparatus and method

Details Position detection apparatus and method Position detection apparatus and method

2006-01-31

2006-01-31

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C250S548000

Reexamination Certificate

active

06992766

ABSTRACT:
A method of detecting a position of a mark within image data. The method includes a first step of obtaining a first position of the mark based on a first degree of correlation between a first template and the image data, the first template having a first feature point to obtain the first degree of correlation, a second step of obtaining a second position of the mark based on a second degree of correlation between a second template and the image data, the second template having a second feature point, of which a position is different from that of the first feature point, to obtain the second degree of correlation, and a third step of detecting the position of the mark through the first and second steps.

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