Compensating for effects of non-isotropic gas mixtures in...

Details Compensating for effects of non-isotropic gas mixtures in... Compensating for effects of non-isotropic gas mixtures in...

2006-05-09

2006-05-09

Lee, Andrew H. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S450000, C356S517000

Reexamination Certificate

active

07042574

ABSTRACT:
Methods and apparatus for reducing the effects of non-isotropic gas distributions on interferometry measurements are disclosed.

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