Process for manufacturing integrated chemical microreactors...

Details Process for manufacturing integrated chemical microreactors... Process for manufacturing integrated chemical microreactors...

2006-03-07

2006-03-07

Pelham, Joseph (Department: 3742)

Electric heating

Heating devices

With heater-unit housing, casing, or support means

C219S201000, C435S287200, C435S288500

Reexamination Certificate

active

07009154

ABSTRACT:
The microreactor is completely integrated and is formed by a semiconductor body having a surface and housing at least one buried channel accessible from the surface of the semiconductor body through two trenches. A heating element extends above the surface over the channel and a resist region extends above the heating element and defines an inlet reservoir and an outlet reservoir. The reservoirs are connected to the trenches and have, in cross-section, a larger area than the trenches. The outlet reservoir has a larger area than the inlet reservoir. A sensing electrode extends above the surface and inside the outlet reservoir.

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