Pre-aligner

Details Pre-aligner Pre-aligner

2006-05-09

2006-05-09

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

C250S559290, C414S754000

Reexamination Certificate

active

07042568

ABSTRACT:
The present invention is a pre-aligner capable of determining the center of a wafer by casting light onto a wafer that is positioned above a charge-coupled device (CCD). The pre-aligner performs this operation by directing light emitted from a single LED simultaneously onto the wafer and the CCD. The light emitted from the LED is directed through a light guide in order to direct the light onto the wafer and CCD. A lens collimates the light exiting the light guide such that the light, as it passes the wafer's edge, is substantially perpendicular to the wafer's edge. The light guide may be removably secured to the pre-aligner housing for easy installation removal. The pre-aligner is capable of self-calibrate the LED.

REFERENCES:
patent: 5238354 (1993-08-01), Volovich
patent: 5644400 (1997-07-01), Mundt
patent: 5737096 (1998-04-01), Yakeuchi
patent: 5740034 (1998-04-01), Saeki
patent: 6038029 (2000-03-01), Finarov
patent: 6162008 (2000-12-01), Perkins et al.
patent: 6489626 (2002-12-01), van der Muehlen et al.
patent: WO 97 37376 (1997-10-01), None
Patent Abstract of Japan, vol. 2002, No. 09, Sep. 4, 2002.

Affiliated with

Also associated with

Rating

Pre-aligner does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pre-aligner, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pre-aligner will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3580817