Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2006-01-24

2006-01-24

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S071000, C355S077000, C430S322000

Reexamination Certificate

active

06989886

ABSTRACT:
A lithographic apparatus comprises an illumination system that supplies a projection beam of radiation, which is patterned using a patterning system. A projection system projects the patterned beam along a predetermined beam path onto a target portion of a substrate. The projection system comprises an array of lenses located such that each lens directs a respective portion of the patterned beam towards a respective part of the target portion of the substrate. The projection system also comprises a series of lens components spaced apart along the beam path between the patterning system and the array of lenses. The lens components are dimensioned to collect at least third order diffraction components of the patterned beam.

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