Polishing pad with high optical transmission window

Details Polishing pad with high optical transmission window Polishing pad with high optical transmission window

2006-01-10

2006-01-10

Wilson, Lee D. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

By optical sensor

C451S028000, C451S041000

Reexamination Certificate

active

06984163

ABSTRACT:
The present invention provides a chemical mechanical polishing pad comprising a polishing pad having a window formed therein and wherein the window is formed from a reaction of an aliphatic polyisocyanate, a hydroxyl-containing material and a curing agent.

REFERENCES:
patent: 6280290 (2001-08-01), Birang et al.
patent: 6387312 (2002-05-01), Roberts et al.
patent: 6832950 (2004-12-01), Wright et al.
patent: 2004/0082276 (2004-04-01), Prasad
patent: 2004/0082287 (2004-04-01), Wright et al.
patent: 2004/0102141 (2004-05-01), Swisher et al.
patent: 2005/0060943 (2005-03-01), Turner et al.

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